Robotic Automation


	Robotic Automation

sbvenki

8-8-2009 5:26 AM

24 views

tags:

load port for automated wafer handling, robotic automation, 300mm load port, fab customization.

sbvenki says:

This report describes a simulation study characterizing the advantages and disadvantages of implementing multiple load ports on metrology equipment in a semiconductor factory. Three methods of automated material handling (AMH) for 300 mm.

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<div style="margin: 12px 0px; font-family: arial; color: #333333; background: #ffffff; border: solid 4px #e5e5e5; width: 100%; clear: left;"><div class="CM_CTB_Content_Wrap" style="margin: 0px; padding: 0px;background-color: #ffffff;"><div style="border-bottom: solid 1px #dcdcdc; white-space: nowrap; margin-bottom: 8px; background-color: #eeeeee ;background-image: url(http://www.clipmarks.com/images/source-bg.gif); background-repeat: repeat-x; height: 24px; line-height: 24px; vertical-align: middle; padding-bottom: 4px; color: #666666; font-size: 10px;" ><a href="http://clipmarks.com/clip-to-blog/" title="see clips that are hot right now"><img src="http://content.clipmarks.com/blog_embed/89c03c39-1331-42af-b3b1-fa2ac58d6507/100E2429-678C-463F-8039-08B083DDD72E/" alt="" width="19" height="19" border="0" style="vertical-align: middle; margin: 0px 4px; display: inline; border: none; float:none;" /></a>clipped from <a title="http://www.kensingtonlabs.com/ProdLoad1.htm?id=loadport" href="http://www.kensingtonlabs.com/ProdLoad1.htm?id=loadport" style="font-size: 11px;">www.kensingtonlabs.com</a></div><blockquote style="text-align: left; padding: 0px 8px; margin: 4px 0px 8px 0px; background: transparent; border: none;" cite="http://www.kensingtonlabs.com/ProdLoad1.htm?id=loadport"><div align="center"><img src="http://content8.clipmarks.com/blog_cache/www.kensingtonlabs.com/img/08B146C6-7889-4048-BC12-AB46C31E4952" alt="" /></div></blockquote><div style="height: 2px; font-size: 2px; background: #dcdcdc; border-bottom: solid 1px #f5f5f5; margin: 2px 4px;"></div><blockquote style="text-align: left; padding: 0px 8px; margin: 4px 0px 8px 0px; background: transparent; border: none;" cite="http://www.kensingtonlabs.com/ProdLoad1.htm?id=loadport"><div align="center"><img src="http://content9.clipmarks.com/blog_cache/www.kensingtonlabs.com/img/3382BDF9-CFBC-46CB-BB16-A8D6849F7182" alt="" /></div></blockquote><div style="border-bottom: solid 1px #dcdcdc; white-space: nowrap; margin-bottom: 8px; background-color: #eeeeee ;background-image: url(http://www.clipmarks.com/images/source-bg.gif); background-repeat: repeat-x; height: 24px; line-height: 24px; vertical-align: middle; padding-bottom: 4px; color: #666666; font-size: 10px;" ><a href="http://clipmarks.com/clip-to-blog/" title="see clips that are hot right now"><img src="http://content6.clipmarks.com/images/clip-icon.gif" alt="" width="19" height="19" border="0" style="vertical-align: middle; margin: 0px 4px; display: inline; border: none; float:none;" /></a>clipped from <a title="http://clipmarks.com/" href="http://clipmarks.com/" style="font-size: 11px;">clipmarks.com</a></div><blockquote style="text-align: left; padding: 0px 8px; margin: 4px 0px 8px 0px; background: transparent; border: none;" cite="http://clipmarks.com/"><div align="center"><img src="http://content7.clipmarks.com/blog_cache/clipmarks.com/img/94F9AA07-C33B-48E4-90BC-D2F7FE9A342A" alt="" /></div></blockquote><div style="border-bottom: solid 1px #dcdcdc; white-space: nowrap; margin-bottom: 8px; background-color: #eeeeee ;background-image: url(http://www.clipmarks.com/images/source-bg.gif); background-repeat: repeat-x; height: 24px; line-height: 24px; vertical-align: middle; padding-bottom: 4px; color: #666666; font-size: 10px;" ><a href="http://clipmarks.com/clip-to-blog/" title="see clips that are hot right now"><img src="http://content8.clipmarks.com/images/clip-icon.gif" alt="" width="19" height="19" border="0" style="vertical-align: middle; margin: 0px 4px; display: inline; border: none; float:none;" /></a>clipped from <a title="http://www.kensingtonlabs.com/ProdLoad1.htm?id=loadport" href="http://www.kensingtonlabs.com/ProdLoad1.htm?id=loadport" style="font-size: 11px;">www.kensingtonlabs.com</a></div><blockquote style="text-align: left; padding: 0px 8px; margin: 4px 0px 8px 0px; background: transparent; border: none;" cite="http://www.kensingtonlabs.com/ProdLoad1.htm?id=loadport"><div align="center"><img src="http://content9.clipmarks.com/blog_cache/www.kensingtonlabs.com/img/E9AEAE29-70BE-453C-A7B9-AF02368535DF" alt="" /></div></blockquote></div><div style="margin: 0px 6px 6px 4px;"><table style="font-size: 11px;border-spacing: 0px;padding: 0px;" cellpadding="0" cellspacing="0" width="100%"><tr><td style="background:transparent;border-width:0px;padding:0px;">&nbsp;</td><td align="right" style="background:transparent;border-width:0px;padding:0px;width:107px" width="107"><a href="http://clipmarks.com/share/100E2429-678C-463F-8039-08B083DDD72E/blog/" title="blog or email this clip"><img src="http://content6.clipmarks.com/images/c2b-foot.png" border="0" alt="blog it" width="107" height="17" style="border-width:0px;padding:0px;margin:0px;" /></a></td></tr></table></div></div>

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